VSS error on several servers

Had to start a new server due to drive change and previsou database mess up.
In full file backup have VSS error in all VM servers and two “normal” servers. Cant be a coincidence so many failed VSS machines. Example of one of them:

Starting unscheduled full file backup…
Component caption= name=VM016\X
Component caption= name=VM016\X
Component caption= name=VM016\X
Component caption= name=VM016\X
Component caption= name=VM016\X
Indexing of “X Data” done. 139 filesystem lookups 0 db lookups and 0 db updates
X - VM: Loading file list…
X - VM: Started loading files…
Waiting for file transfers…
Removing snapshot on “X - VM” for path “X Data” failed: FAILED
Writer WIDWriter has failure state VSS_WS_FAILED_AT_BACKUP_COMPLETE with error S_OK
Client X - VM went offline.
Waiting for file hashing and copying threads…
Waiting for metadata download stream to finish
Writing new file list…
All metadata was present
Transferred 1.15634 GB - Average speed: 71.8956 MBit/s
Time taken for backing up client X - VM: 2m 43s
Backup failed